|제목(국문)||단파장 X-선 형성을 위한 Monochromator 의 제작 및 성능평가|
|제목(영문)||Fabrication and Performance Evaluation of Monochromator for Monochromatic X-ray|
(S. H. Lee
이창준 (C. J. Lee ,전남대학교 기계공학과 ) ▷공저자네트워크등록하기
전인수 (I. S. Jeon ,전남대학교 기계공학과 ) ▷공저자네트워크등록하기
The performance of X-ray microscope has been developed for the nondestructive inspection. It is necessary that high intensity monochromatic beam is made through the multilayer X-ray monochromator. In this paper, multilayer X-ray monochromator for improvement of performance of an X-ray microscope was designed and fabricated. The six W/Al bilayers were deposited onto the surface of silicon substrate to fabricate the multilayer monochromator. The condition and degree of precision of deposited surface of bilayers were measured by SEM. Finally, to evaluate, it compared the monochromator with a filter of X-ray.
|keyword||Monochromator(모노크로메터), Monochromatic X-ray(단파장 X-선), Non-destructive inspection(비파괴검사), X-ray microscope(X-선 현미경)|
|저널명||대한기계학회 추계학술대회 ▷관련저널보기|