Recently, many studies have been conducted to understand the characteristics of the unique functional surface existing in the nature and to mimic its shape and performance. Among natural functional surfaces, the moth's eye is one of the most well-known objects and this surface has an anti-reflective property for visible light. To achieve this performance, Moth’s eye is known to be composed of hierarchical structures in which numerous nanostructures are placed on a lens shaped microstructure. From a performance point, researchers have tried to fabricate the hierarchical structures because the hierarchical structure has a lower reflectivity than nanostructured monolayer without micro-structured layer underneath. In this study, we try to introduce a simple and robust method to fabrication Moth’s eye inspired surface by using a temperature-sensitive shape memory polymer. The temperature-sensitive shape memory polymer is a material that has a property to recover a temporary shape to their permanent shape induced by a temperature change. By applying this characteristic of shape memory polymer, the hierarchical structures that have anti-reflective property was able to be fabricated by using simple replication process. Besides Moth’s eye inspired surface, we may also apply this process to fabricate the other micro/nano hierarchical structures.