제목(국문) | 양극산화공정시 온도계수변화에 따른 포어 생성의 영향 |
---|---|
제목(영문) | Properties of pore generation by variation of temperature in AAO process |
저자 |
신홍규
(H Shin
,강원대학교 (rushhong@kangwon.ac.kr)
)
▷공저자네트워크등록하기
권종태 (J Kwon ,강원대학교 ) ▷공저자네트워크등록하기 서영호 (Y Seo ,강원대학교 ) ▷공저자네트워크등록하기 김병희 (B Kim ,강원대학교 ) ▷공저자 네트워크 보기 |
초록 | In this paper, we present the affection of pore generation with respect to variation of temperature in the anodic aluminum oxidation(AAO) process. In conventional AAO methods for aluminum bulk sheet over 25mm, mild anodizing method with low anodizing voltage at 40C temperature has usually been used. However, it is required to have a long processing time for mass production. In this paper, we suggested the hard anodizing method by low temperature for aluminum thin film of Imm. Through various AAO experiments with respect to the variation of temperature, pore diameter and inter-pore(between pore and pore) distance at large area can be determined. In order to analysis the pore generation, FE-SEM was measured. Pore diameter and inter-pore distance are about 200nm and 250nm. Finally, concave nano-structures with various diameters can be successfully obtained after etching process to remove selectively AAO layer. |
keyword | hard anodizing, low temperature, thin film |
저널명 | 한국공작기계학회 추계학술대회 ▷관련저널보기 |
VOL | 8 |
PAGE | 371-374 |
발표년도 | 2008 |
원문파일 |
![]() |