제목(국문) | 극미세 3차원 형상복제를 위한 금속몰드 제작에 관한 연구 |
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제목(영문) | Fabrication of 3D Metallic Molds for Multi-replication of Microstructures |
저자 |
배공명
(Kong Myung Bae
,부산대학교
)
▷공저자 네트워크 보기
고종수 (Jong Soo Ko ,부산대학교 ) ▷공저자 네트워크 보기 박상후 (Sang Hu Park ,부산대학교 ) ▷공저자네트워크등록하기 임태우 (Tae Woo Lim ,KAIST ) ▷공저자 네트워크 보기 양동열 (Dong-Yol Yang ,KAIST ) ▷공저자네트워크등록하기 |
초록 | Fabrication of a three-dimensional (3D) metallic mold for multi-production of a microstructure was studied to settle the problem of long processing time in 3D microfabrication. To date, complicated 3D microstructures including 3D photonic crystals, 3D microlens array, 3D filter for microfludics, and something else were created successfully using the two-photon polymerization (TPP) which was considered as paving the way to fabricate a real 3D shape in nano/microscale. However, for those fabrications, much processing time and efforts were inevitably required. To solve this issue, a simple and effective way was proposed in this paper; 3D master patterns were prepared using TPp, and then counter-shaped Ni molds were fabricated by electroforming process. By using these molds, 3D microstructures can be reproduced with short-processing time and low-effort comparing to the conventional approach, TPP We report some parameters to fabricate a metallic mold precisely. |
keyword | Two-photon Polymerization(이광자 광중합), Three-dimensional Microstructures(3차원 극미세 형상), Metallic Mold(금속몰드), Mass production(대량생산) |
저널명 | 한국정밀공학회지 ▷관련저널보기 |
VOL | 26 |
PAGE | 119-125 |
발표년도 | 2009 |
원문파일 |
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