국내 최대 기계 및 로봇 연구정보

국내학술대회

216

국내학술대회 제목 게시판 내용
제목(국문)	다공성 알루미나구조물을 이용한 폴리머상의 나노패턴 전사
제목(영문)	Fabrication of Polymer Replica with Nano Patterns Using Porous Alumina Structure
저자	박용민 (Y. M. Park ,강원대학교 ) ▷공저자 네트워크 보기 신홍규 (H. G. Shin ,강원대학교 ) ▷공저자네트워크등록하기 서영호 (Y. H. Seo ,강원대학교 ) ▷공저자네트워크등록하기 김병희 (B. H. Kim ,강원대학교 ) ▷공저자 네트워크 보기
초록	Anodic Aluminum Oxidation (AAO) process is widely used as a template or a mold mask of potential applications such as carbon nano tube (eNT), nano rod and nano dots. Different from conventional patterning methods such as e-beam, FIB and photolithograph, AAO has been known that it is possible to fabricate highly ordered nano-patterns on large area. In this study, we introduce a novel anodizing method, which is used low temperature and high voltage. Using LTHV anodizing method, we can obtain a porous alumina membrane with various inter-pore distance and pore diameter. In order to evaluate our porous alumina membrane, various nano-patterns were replicated by using embossing system with various experimental conditions such as pressure, temperature and processing time. Finally, nano pillar arrays can be successfully obtained on PMMA.
keyword	Anodic Aluminum Oxidation(양극산화), Hot embossing(핫 엠보싱), Polymer replica(폴리머 복제)
저널명	한국공작기계학회 춘계학술대회 ▷관련저널보기
VOL	9
PAGE	456-459
발표년도	2009
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