제목(국문) | 양극산화공정을 이용한 반사방지 성형용 나노 마스터 개발 |
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제목(영문) | Fabrication of Nano Master with Anti-reflective Surface Using Aluminum Anodizing Process |
저자 |
신홍규
(H. K. Shin
,강원대학교
)
▷공저자네트워크등록하기
박용민 (Y. M. Park ,강원대학교 ) ▷공저자 네트워크 보기 서영호 (Y. H. Seo ,강원대학교 ) ▷공저자네트워크등록하기 김병희 (B. H. Kim ,강원대학교 ) ▷공저자 네트워크 보기 |
초록 | 나노마스터, 반사방지, 알루미늄 양극산화, 핫엠보싱, 나노필라 |
초록(영문) | A simple method for the fabrication of porous nano-master for the anti-reflection effect on the transparent substrates is presented. In the conventional fabrication methods for antireflective surface, coating method using materials with low refractive index has usually been used. However, it is required to have a high cost and long processing time for mass production. In this paper, we developed a porous nano-master with anti-reflective surface for the molding stamper of the injection mold, hot embossing and UV imprinting by using the aluminum anodizing process. Through two-step anodizing and etching processes, a porous nano-master with anti-reflective surface was fabricated at the large area. Pattern size Pore diameter and inter-pore distance are about l30nm and 200nm, respectively. In order to replicate anti-reflective structure, hot embossing process was performed by varying the processing parameters such as temperature, pressure and embossing time etc. Finally, antireflective surface can be successfully obtained after etching process to remove selectively silicon layer of AAO master. |
keyword | 나노마스터, 반사방지, 알루미늄 양극산화, 핫엠보싱, 나노필라 |
저널명 | 한국공작기계학회지 ▷관련저널보기 |
VOL | 18 |
PAGE | 697-701 |
발표년도 | 2009 |
원문파일 |
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