Advancing ultra-precision light source technology from IR to EUV regime using femtosecond pulse lasers, and interdisciplinary applications including high-precision optical metrology, nano/micro material processing/synthesis, precision spectroscopy, time/frequency standards, and future space missions.

본 연구단은 극초단 레이저를 공통 기반으로 하여, 적외선(IR)부터 극자외선(EUV) 영역에 이르는 광대역(broadband) 가간섭(coherent) 광원기술을 개발하고, 이를 초정밀 측정기술, 초정밀 광가공/합성/패터닝 기술, 시간/주파수 표준 확립 및 차세대 우주 미션에 이르는 다양한 응용분야에 적용하는 연구를 수행하고 있습니다.

The objective of our research is to exploit the newly emerging field of ultrafast optics so as to establish ultra-precision technologies that will enable nano-fabrication and metrology over extensive ranges as demanded in the next generation of precision engineering. To the end, a systematic approach will be pursued to generate noble coherent light sources covering the whole optical spectrum spanning from the THz wave to the EUV by making the most of femtosecond laser pulses. The study aiming to investigate ultrafast optics for improving the level of ultraprecision comprises a series of research subjects that are categorized into five groups as follows:

1. Developments of new ultrafast light sources (차세대 초고속 광원의 개발)
2. Ultra-precision dimensional metrology (초정밀 광측정 기술)
3. Ultrafast photonics for nano & micro manufacturing (나노/마이크로 광가공 기술)
4. Ultrafast photonics for next-generation space missions (차세대 우주 측정미션)
5. Ultrafast plasmonics and coherent EUV generation (초고속 플라즈모닉스 기술)

These itemized R&D subjects are investigated individually in parallel with each other, with focus on creating their possible contributions for the advance of fundamental ultra-precision science and technology. And, at the same time, the achieved results of the subject will be synthesized and combined together to demonstrate their usefulness as basic core technologies enabling a wealth of industrial applications of ultra-precision.