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성균관대학교 나노입자공학 연구실
| 지도교수 | 김태성 |
|---|---|
| 전공분류 | 나노공학(Nano Technology), |
| 주소 | Sungkyunkwan University 2nd complex research building #83502, 2066 Seobu-ro, Jangan-gu, Suwon, 440-746, Korea |
| 전화 | 031-290-7466 |
| 홈페이지 | http://nptl.skku.edu/ |
실험실소개
연구분야
연구성과
Study on the effect of ceria concentration on the silicon oxide removal rate in chemical mechanical planarization
Study on the effect of ceria concentration on the silicon oxide removal rate in chemical mechanical planarization
Donggeon Kwak, Seungjun Oh, Juhwan Kim, Junho Yun, and Taesung Kim, 2020-10, Vol. 0, No. 125670, pp. 0~ 0
Donggeon Kwak, Seungjun Oh, Juhwan Kim, Junho Yun, and Taesung Kim
Recyclable free-polymer transfer of nano-grain MoS2 film onto arbitrary substrates
Nanotechnology, 2020-10, Vol. 32, No. 4, pp. 0~ 0
Yujin Choa, Hoomi Choi, Sung won Mo, Taesung Kim
Removal of nano-sized surface particles by CO2 gas cluster collisions for dry cleaning
Microelectronic Engineering, 2020-10, Vol. 234, No. 15, pp. 111438~ 0
Study on the effect of ceria concentration on the silicon oxide removal rate in chemical mechanical planarization
Donggeon Kwak, Seungjun Oh, Juhwan Kim, Junho Yun, and Taesung Kim, 2020-10, Vol. 0, No. 125670, pp. 0~ 0
Donggeon Kwak, Seungjun Oh, Juhwan Kim, Junho Yun, and Taesung Kim
Recyclable free-polymer transfer of nano-grain MoS2 film onto arbitrary substrates
Nanotechnology, 2020-10, Vol. 32, No. 4, pp. 0~ 0
Yujin Choa, Hoomi Choi, Sung won Mo, Taesung Kim
Removal of nano-sized surface particles by CO2 gas cluster collisions for dry cleaning
Microelectronic Engineering, 2020-10, Vol. 234, No. 15, pp. 111438~ 0
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